au.\*:("HAUGENEDER, Ernst")
Results 1 to 4 of 4
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Strain inhomogeneity mapping in single-crystal layers and membranes by X-ray diffractometryZSOLDOS, Lehel; GRÖGER, Viktor; HAUGENEDER, Ernst et al.Journal of applied crystallography. 2002, Vol 35, pp 17-20, issn 0021-8898, 1Article
High-speed data storage and processing for projection mask-less lithography systemsVOSS, Sven-Hendrik; TALMI, Maati; SANITER, Juergen et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 976-979, issn 0167-9317, 4 p.Conference Paper
Projection mask-less lithography (PML2) : First results from the multi beam blanking demonstratorEDER-KAPL, Stefan; HAUGENEDER, Ernst; LANGFISCHER, Helmut et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 968-971, issn 0167-9317, 4 p.Conference Paper
Demonstrators : a vital step forward for projection mask-less lithography (PML2)BRANDSTAETTER, Christoph; HAUGENEDER, Ernst; REIMER, Klaus et al.SPIE proceedings series. 2005, pp 188-195, isbn 0-8194-5830-9, 8 p.Conference Paper